3061.
Adhesion properties of nitrogen ion implanted ultra-nanocrystalline diamond films on silicon substrate
Palnitkar, U. A.; Joseph, P. T.; Niu, H.; Huang, H. Y.; Fang, W. L.; Cheng, H. F.; Tai, N. H.; 林諭男; Lin, I-nan
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2008-04-01
[Graduate Institute & Department of Physics] Journal Article Diamond and Related Materials 17(4-5), pp.864-867
appreciably due to ion implantation. The scratch test has been used to study the adhesion of the film to the substrate, which illustrated that the critical
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