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    Title: 微米級金屬表面粗糙度之平面偏振散射光量測
    Authors: 劉承揚;張力仁;王凱平
    Contributors: 淡江大學機械與機電工程學系
    Keywords: 偏振散射光;表面粗糙度;非接觸式
    Date: 2014-08
    Issue Date: 2014-09-25 09:18:32 (UTC+8)
    Abstract: 本文主要研究探討微米級金屬表面粗糙度之平面偏振散射光量測,以取代傳統的接觸式量測。在實驗方面,我們自行設計並且架設一套二維非接觸式的自動光學系統來量測微米級金屬表面粗糙度的散射光場,並自行撰寫程式加以分析。在試片方面,本文選用Ra = 0.05 μm、0.1 μm、0.2 μm、0.4 μm、0.8 μm、1.6 μm等,各種不同表面粗糙度的標準試片,針對散射角以每5度進行量測。本文研究結果證實此非接觸式系統可精準量測出微米級金屬表面粗糙度與表面特徵。
    Relation: 第十八屆奈米工程暨微系統技術研討會
    Appears in Collections:[機械與機電工程學系暨研究所] 會議論文

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