This paper presents an explicit dynamic finite element method (FEM) in conjunction with the forming limit diagram (FLD) to analyze the forming limit for the various arc radii of punch in micro deep drawing of square cup. In the present study, the tensile test and friction test are performed to obtain the material parameters of the electro-deposited copper foil according to the ASTM standards. Importing these properties, the numerical analysis is conducted by the explicit dynamic FEM. The FLD in numerical simulation is used as the criterion of the forming limit in micro deep drawing of the square cup. The forming limit, deformed shape, punch load-stroke relationship, height of cup and thickness distribution of square cup, are discussed and compared with the experimental results. It shows that a good agreement is achieved from comparison between simulated and experimental results. When the arc radii of punch increase with Rp=0.2, 0.5 and 0.8mm, the limit drawing ratio increases from 1.90 to 2.03 and 2.10. The forming limit of square cup increases with an increase of the arc radii of punch. From this investigation, the results of this paper can be used as reference in the relative researches and applications of micro forming.