Development of diamond cathode materials for enhancing the electron field emission and plasma characteristics using two-step microwave plasma enhanced chemical vapor deposition process

doi:10.1116/1.4864067

淡江大學機構典藏 > 理學院 > 物理學系暨研究所 > 期刊論文 > Item 987654321/97214

請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/97214

題名:	Development of diamond cathode materials for enhancing the electron field emission and plasma characteristics using two-step microwave plasma enhanced chemical vapor deposition process
作者:	Lou, Shiu-Cheng;Chen, Chu-lung;Srinivasu Kunuku;Leou, Keh-Chyang;Lee, Chi-Young;Chen, Huang-Chin;Lin, I-Nan
貢獻者:	淡江大學物理學系
日期:	2014-03
上傳時間:	2014-03-18 10:29:47 (UTC+8)
出版者:	College Park: American Institute of Physics
摘要:	The enhancement on the plasma illumination characteristics of a cylindrical microplasma device due to the utilization of hybrid-diamond (HiD) films as cathode was systematically investigated. The improved plasma illumination behavior was closely related to the enhanced electron field emission (EFE) properties of the diamond films. The HiD films, which possessed better EFE properties, including lower turn-on field for inducing the EFE process [(E 0)efe = 2.7 V/μm] and higher EFE current density [(Je )efe = 2.8 mA/cm2, at 10.6 V/μm], resulted in superior illumination performance for the microplasma devices. The plasma can be triggered at a low threshold field of (Eth)pl. = 0.166 V/μm, attaining a large plasma current density of (Je)pl. = 9.6 mA/cm2 at an applied field of 0.266 V/μm (plasma density of ne = 1.70 × 1015 cm−3). The better EFE for the HiD films is ascribed to the unique granular structure of the films. Transmission electron microscopic studies revealed that the HiD films contained large diamond aggregates evenly distributed among the ultrasmall grain matrix. There presents a-few-layer graphite, surrounding the large aggregates that formed electron transport networks and improved the EFE properties for the HiD films. The superior EFE properties for the HiD cathode materials are the prime factor for improving plasma illumination characteristics for the cylindrical microplasma devices.
關聯:	Journal of Vacuum Science & Technology B 32(2), pp.021202(9pages)
DOI:	10.1116/1.4864067
顯示於類別:	[物理學系暨研究所] 期刊論文

文件中的檔案:

檔案	描述	大小	格式	瀏覽次數
Development of diamond cathode materials for enhancing the electron field emission and plasma characteristics using two-step microwave plasma enhanced chemical vapor deposition process.pdf		3458Kb	Adobe PDF	1	檢視/開啟
index.html		0Kb	HTML	51	檢視/開啟

在機構典藏中所有的資料項目都受到原著作權保護.

TAIR相關文章

資料載入中.....