English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 49645/84944 (58%)
造訪人次 : 7701232      線上人數 : 62
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜尋範圍 查詢小技巧:
  • 您可在西文檢索詞彙前後加上"雙引號",以獲取較精準的檢索結果
  • 若欲以作者姓名搜尋,建議至進階搜尋限定作者欄位,可獲得較完整資料
  • 進階搜尋
    請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/96501


    題名: 以精密電解削銳輪磨及反應離子蝕刻之複合製程快速加工鑽石膜之研究
    其他題名: Development of a Combined Process of Elid-Grinding and Rie for Rapidremoval of Cvd Diamond Film
    作者: 趙崇禮
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: CVD鑽石膜;反應離子蝕刻;空氣電漿;微結構;CVD diamond grain;RIE;Atmospheric pressure air plasma;Microstructure
    日期: 2007-11
    上傳時間: 2014-03-07 11:52:44 (UTC+8)
    摘要: 鑽石具有極佳的物理特性與化學特性如:高硬度、低摩擦係數、高熱傳導係數、良好的機械強度、高光學穿透性。這些特性具有潛力應用於電子元件、光學元件及抗腐蝕鍍膜上。近年來以化學氣相沉積法製作多晶鑽石膜已成為成熟且廣泛的合成技術。由於本計劃原規劃為兩年期之計畫,因僅通過第一年,故僅就反應離子蝕刻之複合製程快速加工鑽石膜進行研究。本計劃採用常壓空氣電漿(APAP)及反應離子蝕刻(RIE)方法來製作鑽石微結構,並且將鑽石微結構分別應用在熱化學拋光及奈米壓印上。並分別以穿隧式電子顯微鏡(TEM)、微拉曼頻譜儀(micro-Raman spectroscopy)、表面粗度儀(α-step)來檢測表面形貌與分析組成物。藉由分析結果發現鑽石微結構可成功應用於熱化學拋光,並且鑽石微結構具有應用於奈米壓印之潛力。
    Diamond has many outstanding physical and chemical properties such as extreme hardness, low friction coefficient, high thermal conductivity, high mechanical strength, and high optical transparency. Therefore, several potential applications can be anticipated in electronics, optics, protective corrosion resistant coatings. In recent years, using chemical vapor deposition (CVD) methods to synthesize polycrystalline diamond is a mature and popular technology. This study not only indicated the producing mechanism of these microstructures on CVD diamond grains by atmospheric pressure air plasma (APAP) and reactive ion etching, but also used these microstructures applying to the thermal-chemical polishing and nano-imprint process. Scanning electron microscope, micro-Raman spectroscopy and alpha-step were used to study the surface morphology and component analysis, respectively. From the results showed that the microstructures could be successfully combined the thermal-chemical polishing method and these microstructures had a potential to apply in nano-imprint process.
    關聯: 機械固力學門成果發表會論文集,10頁
    顯示於類別:[機械與機電工程學系暨研究所] 會議論文

    文件中的檔案:

    檔案 描述 大小格式瀏覽次數
    以精密電解削銳輪磨及反應離子蝕刻之複合製程快速加工鑽石膜之研究 _中文摘要.docx摘要14KbMicrosoft Word67檢視/開啟
    以精密電解削銳輪磨及反應離子蝕刻之複合製程快速加工鑽石膜之研究 _英文摘要.docx摘要14KbMicrosoft Word65檢視/開啟

    在機構典藏中所有的資料項目都受到原著作權保護.

    TAIR相關文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回饋