本第三年計畫先完成CMOS共用壓力感測陣列晶片之測試，再嘗試開發非平面(如微圓管)之微管道感測與驅動電極之製程，改善微流道感測驅動的效率。另外研究在微流道內表面沾濕特性之控制，確認與表面特性相關之處理技術，在微冷卻系統內之液體驅動課題上變得重要。最後將本三年期開發之微機電感測與驅動技術，應用於一增益迴路式微熱管的導熱性能。 The main object of this project (the third year) is to explore a CMOS pressure-sensing platform, the process of a novel nonplanar electrode embedded in a circular microchannel, the detailed mechanism of a EHD micropump. We also applied all the available MEMS techniques, explores in this project, to propose a modified design for a MLHP for performance enhancing.
