本文應用高熱膨脹係數材料，製作低溫熱挫曲微致動元件。文中選用聚-對二甲苯(parylene)為主體材料，成功製作能於適當溫度驅動之熱挫曲致動元件，並應用於新型微液體驅動器，其尺寸為次毫米等級，不但能在低於40度C以下熱致動，並可提供7.05.mu.m/s之流速，未來整合為留置針型無閥微型幫浦，進行微流體系統的驅動或藥物傳遞。 In this study parylene is chosen as the major material to fabricate a diaphragm-type thermo-buckled microactuator with a working temperature below 40 degree C due to its property of large thermal expansion coefficient compared to metals. With adding a pair of diffusion-divergent channels at the entrance and exit of the actuated diaphragm, we made a valveless micropump of sub-mm size and drive it by an AC power of 6V peak-to-peak without apparent temperature rise. The maximum flow speed was measured and estimated as 7.05.mu.m/s. This thermo-buckled micropump is supposed to be integrated into the implantable bio-sensing system for microfludic driving and drug delivery.
2007 CSME CONF中國機械工程學會第24屆全國學術研討會論文集=Proceedings of the 24th National Conference on Mechanical Engineering the Chinese Society of Mechanical Engineers，6頁