A Gas-Leakage Sensor for PDMS Chip Frames

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 會議論文 > Item 987654321/96434

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/96434

题名:	A Gas-Leakage Sensor for PDMS Chip Frames
作者:	Yang, Meng-Chiao;Yang, Lung-Jieh;Wang, Hsin-Hsiung
贡献者:	淡江大學機械與機電工程學系
关键词:	PDMS;Gas-leakage;Diffusion coefficient
日期:	2008-06
上传时间:	2014-03-07 11:39:11 (UTC+8)
摘要:	This paper proposes a new methodology to detect the gas-leakage and the corresponding diffusion coefficient of PDMS. We use PDMS instead of Pyrex 7740 glass to seal the backside V-groove of pressure sensor chips. We put the sensor into a pressure testing machine and pressurize with CO2 at 300 psi. By observing output voltage, the time of CO2 permeated into cavity of the sensor was easily to find. In this paper, we use two PDMS membrane with different thickness, 45.mu.m and 500.mu.m, to package the sensors and explore the gas-leakage of PDMS membrane. The mathematical model for the leaking process shows that the diffusion coefficients D are 7.4910/sup -10/m2 /sec for 45.mu.m thick PDMS and 1.3810/sup -9/m2 /sec for 500.mu.m thick PDMS, respectively.
關聯:	Proceedings of the 4th Asia Pacific Conference on Transducers and Micro-Nano Technologies (APCOT 2008)，4p.
显示于类别:	[機械與機電工程學系暨研究所] 會議論文

文件中的档案:

档案	大小	格式	浏览次数
A Gas-Leakage Sensor for PDMS Chip Frames_英文摘要.docx	13Kb	Microsoft Word	215	检视/开启

在機構典藏中所有的数据项都受到原著作权保护.

TAIR相关文章