This paper describes a novel micro actuator that adopts surface tension as the driving force. The concept, design, and fabrication were discussed in this work. This device regards a SU-8 peacock-like microstructure as the prototype. After modifying this original peacock-like microstructure, we supposed a novel idea of mounting this surface tension actuator to the tail of a flapping micro aerial vehicle (MAV) and control the flight attitude.
Proceedings of the 4th Asia Pacific Conference on Transducers and Micro-Nano Technologies (APCOT 2008)，4p.