本文探討多軸伺服機構之精確運動控制。我們建立二維及三維空間路徑誤差的幾何模式; 根據路徑誤差的幾何模式設計多軸機構交插耦合控制器, 以改善運動路徑誤差。本研究也規劃多軸命令的產生方法, 產生之命令提供作為多軸伺服機構控制器的參考輸入, 模擬結果顯示交插耦合控制在高速度或速度變化大的時候, 性能優於傳統的前饋與PID控制, 能有效降低路徑誤差。 This research investigates accuracy motion controls for multi-axis servomechanisms. We create geometric models of contour errors in two- and three-dimensional spaces. Based on these models, a cross- coupling controller is design to improve contour errors. A command generator for three- spline straightline and circular path is also developed. The generated motion command is used as reference inputs for multi-axis servomechanism controllers. In the cases of high speed or large speedrate variation, the simulation results show that the performance of the cross-coupling controller is much better than traditional feedforward and PID controllers.