English  |  正體中文  |  简体中文  |  Items with full text/Total items : 51510/86705 (59%)
Visitors : 8263764      Online Users : 123
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/96409


    Title: Semi-SOI Pressure Sensors as Lab-on-Chip Systems Applied to Micro Fluid Dynamics
    Authors: 楊龍杰;康尚文;楊賢政;陳明正
    Contributors: 淡江大學機械與機電工程學系
    Keywords: 半導體矽積絕緣層;壓力感測器;實驗晶片系統;鉑薄膜電阻器;微感測器;微流體力學;熱雜訊;Semi-Soi;Pressure Sensor;Lab-On-Chip;Platinum Thin Film Resistor;Microsensor;Micro Fluid Dynamics;Thermal Noise
    Date: 2000-05
    Issue Date: 2014-03-07 11:34:04 (UTC+8)
    Abstract: 本文提議一種新的微型感測器研究載台,可以將應用於生醫或高速冷卻的微管路,與量測該微流體系統壓力、溫度變化之微感測器,整合製作在同一片材之上。在該玻璃基板載台上,已經事先製作壓阻式矽質微壓力計;白金薄膜電阻的後製程,則用以增加本系統量測溫度變化的功能。最後再以陽極靜電鍵合技術,將矽質微溝道與玻璃基板,結合為所需成品,供進一步現地量測應用。
    This paper proposed a new framework of micro sensor technology toimplement the lab-on-chip systems used in micro fluid dynamics andbiomedical applications. The semi-SOI pressure sensors fabricated onglass substrates provide a platform for silicon micro channels as wellas silicon micro heat-pipes to be operated and monitored in an in-situway. Platinum thin-film resistor evaporated on glass substrates(#7740) augment the capability of temperature measurement beyond thepressure measurement mentioned above. Package issue of second anodicbonding and the thermal noise due to nearby sensor array are ofprimary concerned at the present stage.
    Relation: 第一屆海峽兩岸微系統科技研討會論文集,頁210-213
    Appears in Collections:[機械與機電工程學系暨研究所] 會議論文

    Files in This Item:

    File Description SizeFormat
    Semi SOI Pressure Sensors as Lab on Chip Systems Applied to Micro Fluid Dynamics_中文摘要.docx摘要14KbMicrosoft Word117View/Open
    Semi SOI Pressure Sensors as Lab on Chip Systems Applied to Micro Fluid Dynamics_英文摘要.docx摘要14KbMicrosoft Word100View/Open

    All items in 機構典藏 are protected by copyright, with all rights reserved.


    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback