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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/96409

    Title: Semi-SOI Pressure Sensors as Lab-on-Chip Systems Applied to Micro Fluid Dynamics
    Authors: 楊龍杰;康尚文;楊賢政;陳明正
    Contributors: 淡江大學機械與機電工程學系
    Keywords: 半導體矽積絕緣層;壓力感測器;實驗晶片系統;鉑薄膜電阻器;微感測器;微流體力學;熱雜訊;Semi-Soi;Pressure Sensor;Lab-On-Chip;Platinum Thin Film Resistor;Microsensor;Micro Fluid Dynamics;Thermal Noise
    Date: 2000-05
    Issue Date: 2014-03-07 11:34:04 (UTC+8)
    Abstract: 本文提議一種新的微型感測器研究載台,可以將應用於生醫或高速冷卻的微管路,與量測該微流體系統壓力、溫度變化之微感測器,整合製作在同一片材之上。在該玻璃基板載台上,已經事先製作壓阻式矽質微壓力計;白金薄膜電阻的後製程,則用以增加本系統量測溫度變化的功能。最後再以陽極靜電鍵合技術,將矽質微溝道與玻璃基板,結合為所需成品,供進一步現地量測應用。
    This paper proposed a new framework of micro sensor technology toimplement the lab-on-chip systems used in micro fluid dynamics andbiomedical applications. The semi-SOI pressure sensors fabricated onglass substrates provide a platform for silicon micro channels as wellas silicon micro heat-pipes to be operated and monitored in an in-situway. Platinum thin-film resistor evaporated on glass substrates(#7740) augment the capability of temperature measurement beyond thepressure measurement mentioned above. Package issue of second anodicbonding and the thermal noise due to nearby sensor array are ofprimary concerned at the present stage.
    Relation: 第一屆海峽兩岸微系統科技研討會論文集,頁210-213
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Proceeding

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