English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 49378/84106 (59%)
造訪人次 : 7369260      線上人數 : 53
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜尋範圍 查詢小技巧:
  • 您可在西文檢索詞彙前後加上"雙引號",以獲取較精準的檢索結果
  • 若欲以作者姓名搜尋,建議至進階搜尋限定作者欄位,可獲得較完整資料
  • 進階搜尋
    請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/96399


    題名: 矽質微型感測器應用於微流道的現地量測
    作者: 楊龍杰;楊賢政;康尚文
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: 微熱傳;微感測器;微流道加工Micro Heat Transfer;Micro Sensor;Microchannel Machining
    日期: 1999-12
    上傳時間: 2014-03-07 11:31:25 (UTC+8)
    摘要: 在微流體力學系統中,以(110)矽晶片製作的U型槽與Corning7740玻璃鍵合而成的微流道研究時有所聞。微流道系統具有極小水利直徑(Hydraulic diameter)與高深寬比(Aspect ratio)本質特性,從傳統流體力學的觀點看來,該特性能適用於高熱通量的熱交換器系統。但是在微米級的尺度下,許多流體的基本假設仍然備受爭議。在本篇文章中提議利用微感測器直接量測微流道內溫度與壓力的變化,其作法是在玻璃與矽質微流道鍵合之前,先利用體型微加工技術(Silicon bulk micromachining)於玻璃基材上製作微感測器,包括壓阻式微壓力感測器與白金薄膜溫度感測器。而文中探討的微流道,水利直徑小於1 00微米,深寬比介於3至10之間,能夠滿足個人電腦中央處理器100W/cm/sup 2/的散熱性能要求。
    The micro-channel fabricated on (110) silicon and bonded with Corning 7740 glass was frequently studied in micro-scale fluidic systems. The ultra-low value of hydraulic diameter and the high aspect- ratio configuration of the micro-channel make it the right stuff in cooling the high-flux beat-exchanging systems from the classical aspect of fluid dynamics. However, a lot of fundamental issues in such small-scale flow are still under dispute. In this paper, by the silicon bulk-micromachining, the on-site micro-sensors are fabricated on the Corning 7740 glass before the substrate bonding. The micro piezo-resistive pressure sensor chip and the platinum temperature sensor with high TCR value all design on the glass substrate as on-site sensors. The micro-channels with hydraulic diameter below 100 micrometers and the aspect ratio from 3 to 10 in this work could match the real application of the micro-channel heat sink subject to CPU cooling in the very-near future.
    關聯: 中華民國力學學會第廿三屆全國力學會議論文集二=Proceedings of the 23nd National Conference on Theoretical and Applied Mechanics,頁41531
    顯示於類別:[機械與機電工程學系暨研究所] 會議論文

    文件中的檔案:

    檔案 描述 大小格式瀏覽次數
    矽質微型感測器應用於微流道的現地量測_中文摘要.docx摘要14KbMicrosoft Word108檢視/開啟
    矽質微型感測器應用於微流道的現地量測_英文摘要.docx摘要14KbMicrosoft Word76檢視/開啟

    在機構典藏中所有的資料項目都受到原著作權保護.

    TAIR相關文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回饋