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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/96350


    Title: ANSYS應用於微型壓力感測器之性能評估
    Other Titles: The Application for Estimated of Micro Pressure Sensor in ANSYS
    Authors: 鄭金郎;楊龍杰;康尚文;曾信傑;郭柏甫;黃志豪
    Contributors: 淡江大學機械與機電工程學系
    Keywords: 微壓力感測器;有限元素分析;壓電阻性;整體微加工;靈敏度;惠斯登電橋;Micro Pressure Sensor;Finite Element Analysis;Piezoresistivity;Bulk Micromaching;Sensitivity;Wheatstone Bridge
    Date: 2000-11
    Issue Date: 2014-03-07 11:20:45 (UTC+8)
    Abstract: 本文利用有限元素分析軟體ANSYS來分析一新式微型壓力感測器之壓力薄膜受力情形。依據其薄膜表面佈植之壓電阻受力形變及應力數值,直接推導出壓力感測器之理論輸出電壓靈敏度及非線性度。其結果可作為感測器製作前之性能評估。
    Relation: 2000年第六屆台灣地區ANSYS論文集=2000 ANSYS Taiwan User's Conference,頁311-318
    Appears in Collections:[機械與機電工程學系暨研究所] 會議論文

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