本文之數值結果顯示，流體通過振盪的微梳狀制動器的物理現象與Stokes flow有相當的差異。其所產生之漩渦會使流體速度減慢並增加阻力，而擠壓阻力 和黏滯阻力會消散微梳狀制動器的機械能。由Knudsen number可知微梳狀制動器 的流體為可滑動流，可滑動邊界可使擠壓阻力和黏滯阻力降低約12.2%。最後由 數值結果可知，本研究所運用於微梳狀制動器的計算過程為一蠻有效率的工具。 Numerical results in this work demonstrate that the flow around an oscillating electrode of a micro electrostatic comb drive is quite different from a Stokes flow. A vortex is observed in the region between the electrode and the substrate. This vortex slows down the fluid velocity and significantly increases the damping. Squeeze damping and viscous damping are important energy dissipation mechanisms in oscillating micro comb drives. The Knudsen number for micro comb drives indicates that the flow is a slip flow. The slip boundary conditions reduce the viscous and squeeze dampings by about 12.2%. Numerical results show that the numerical procedure proposed in this work is an effective tool in designing micro comb drives.