A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/96090

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题名:	A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
作者:	Yang, Ming-Zhi;Dai, Ching-Liang;Wu, Chyan-Chyi
贡献者:	淡江大學機械與機電工程學系
关键词:	ammonia microsensor;zinc oxide film;nanorod;readout circuit
日期:	2011-12
上传时间:	2014-02-24 09:32:30 (UTC+8)
出版者:	Basel: M D P I AG
摘要:	A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature.
關聯:	Sensors 11(12), pp.11112–11121
DOI:	10.3390/s111211112
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文

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