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    Title: A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
    Authors: Yang, Ming-Zhi;Dai, Ching-Liang;Wu, Chyan-Chyi
    Contributors: 淡江大學機械與機電工程學系
    Keywords: ammonia microsensor;zinc oxide film;nanorod;readout circuit
    Date: 2011-12
    Issue Date: 2014-02-24 09:32:30 (UTC+8)
    Publisher: Basel: M D P I AG
    Abstract: A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature.
    Relation: Sensors 11(12), pp.11112–11121
    DOI: 10.3390/s111211112
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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