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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/94461

    Title: 噴頭高度對液體霧化流場表現之影響
    Other Titles: Effects of nozzle height to the performance of atomized-liquid flow field
    Authors: 朱哲民;Chu, Che-Min
    Contributors: 淡江大學機械與機電工程學系碩士班
    李宗翰;Lee, Tzung-Hang
    Keywords: 蝕刻;水坑效應;平板蝕刻;Surface etching process;Replacement of rate;Surface treatment;Etching plate;Jet;Flow field;Pressure;flow;Puddle effect
    Date: 2013
    Issue Date: 2014-01-23 14:40:23 (UTC+8)
    Abstract: 近年來大面積平板蝕刻加工越來越廣泛,隨著蝕刻工件面積的變大,在過程中亦產生許多問題,例如蝕刻不均勻等等的現象,故將遭遇到的問題減小或消除,是現在大面積平板加工的走向。
    In recent years, large areas of flat etching process more and more widely, with the etching area become large. There are many problems in the etching process. Such as uneven etching phenomenon…etc. Reducing or eliminating the problem which encounter is the direction of the large area etching process.
    In this article, increase a flow filed with the atomization nozzle. Changing and using the flow filed which is downward and diffused increase the replacement rate. To solve the phenomenon of uneven etching. First, design, production and stability testing the experimental apparatus. Second, measure the pressure outside the tube and volume of water. Then change the height of the nozzle and repeat the experiment. Observe and measure changes in the flow field inside the tank.
    The experimental result is increase replacement rate without the jet strike the plate and uneven. On the other hand, the equation we wrote is helpful when change the Environment and the working fluid. After the experiment, the equation curve is approaching the experimental curve. Equation can forecast the pressure and height of the liquid surface. We can know the limit height of the workpiece without jet strike.
    Appears in Collections:[機械與機電工程學系暨研究所] 學位論文

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