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    题名: Energy Harvesting Thermoelectric Generators Manufactured Using the Complementary Metal Oxide Semiconductor Process
    作者: Yang, Ming-Zhi;Wu, Chyan-Chyi;Dai, Ching-Liang;Tsai, Wen-Jung
    贡献者: 淡江大學機械與機電工程學系
    关键词: energy harvesting;thermoelectric generator;thermocouple;CMOS
    日期: 2013-02
    上传时间: 2014-01-08 23:36:35 (UTC+8)
    出版者: Basel: MDPI AG
    摘要: This paper presents the fabrication and characterization of energy harvesting thermoelectric micro generators using the commercial complementary metal oxide semiconductor (CMOS) process. The micro generator consists of 33 thermocouples in series. Thermocouple materials are p-type and n-type polysilicon since they have a large Seebeck coefficient difference. The output power of the micro generator depends on the temperature difference in the hot and cold parts of the thermocouples. In order to increase this temperature difference, the hot part of the thermocouples is suspended to reduce heat-sinking. The micro generator needs a post-CMOS process to release the suspended structures of hot part, which the post-process includes an anisotropic dry etching to etch the sacrificial oxide layer and an isotropic dry etching to remove the silicon substrate. Experiments show that the output power of the micro generator is 9.4 mW at a temperature difference of 15 K.
    關聯: Sensors 13(2), pp.2359-2367
    DOI: 10.3390/s130202359
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

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