English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 49633/84879 (58%)
造訪人次 : 7692307      線上人數 : 65
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜尋範圍 查詢小技巧:
  • 您可在西文檢索詞彙前後加上"雙引號",以獲取較精準的檢索結果
  • 若欲以作者姓名搜尋,建議至進階搜尋限定作者欄位,可獲得較完整資料
  • 進階搜尋
    請使用永久網址來引用或連結此文件: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/93408

    題名: Energy Harvesting Thermoelectric Generators Manufactured Using the Complementary Metal Oxide Semiconductor Process
    作者: Yang, Ming-Zhi;Wu, Chyan-Chyi;Dai, Ching-Liang;Tsai, Wen-Jung
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: energy harvesting;thermoelectric generator;thermocouple;CMOS
    日期: 2013-02
    上傳時間: 2014-01-08 23:36:35 (UTC+8)
    出版者: Basel: MDPI AG
    摘要: This paper presents the fabrication and characterization of energy harvesting thermoelectric micro generators using the commercial complementary metal oxide semiconductor (CMOS) process. The micro generator consists of 33 thermocouples in series. Thermocouple materials are p-type and n-type polysilicon since they have a large Seebeck coefficient difference. The output power of the micro generator depends on the temperature difference in the hot and cold parts of the thermocouples. In order to increase this temperature difference, the hot part of the thermocouples is suspended to reduce heat-sinking. The micro generator needs a post-CMOS process to release the suspended structures of hot part, which the post-process includes an anisotropic dry etching to etch the sacrificial oxide layer and an isotropic dry etching to remove the silicon substrate. Experiments show that the output power of the micro generator is 9.4 mW at a temperature difference of 15 K.
    關聯: Sensors 13(2), pp.2359-2367
    DOI: 10.3390/s130202359
    顯示於類別:[機械與機電工程學系暨研究所] 期刊論文


    檔案 描述 大小格式瀏覽次數



    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回饋