Common-path laser encoder

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/93407

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题名:	Common-path laser encoder
作者:	Wu, Chyan-Chyi;Yang, Jhih-Sheng;Cheng, Chun-Yao;Chen, Yan-Zou
贡献者:	淡江大學機械與機電工程學系
关键词:	Common-path;Grating;Displacement;Long-range;Nanometer
日期:	2013-01
上传时间:	2014-01-08 23:34:37 (UTC+8)
出版者:	Lausanne: Elsevier S.A.
摘要:	This study proposes a novel common-path laser encoder (CPLE) capable of effectively minimizing environmental disturbance. The proposed CPLE uses a two-aperture phase-shifting technique to form quadrature signals. Experimental results match well with HP5529A results for long-range measurements. Results also show that the estimated measurement resolution is 0.1 ± 0.046 nm. Therefore, the proposed design has great potential for nanometer resolution and long-range applications.
關聯:	Sensors and Actuators A: Physical 189, pp.86–92
DOI:	10.1016/j.sna.2012.08.034
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文

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