Heterodyne common-path grating interferometer with Littrow configuration

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Title:	Heterodyne common-path grating interferometer with Littrow configuration
Authors:	Wu, Chyan-Chyi;Hsu, Cheng-Chih;Lee, Ju-Yi;Chen, Yan-Zou
Contributors:	淡江大學機械與機電工程學系
Date:	2013-06
Issue Date:	2014-01-08 23:32:49 (UTC+8)
Publisher:	Washington: Optical Society of America
Abstract:	This paper presents a heterodyne common-path grating interferometer with Littrow configuration (HCGIL). The HCGIL can effectively overcome environmental disturbance effect and the DC offset and the amplitude variation of the measurement signals. Experimental results match well with the HP5529A results for long-range measurements. Results also show that the estimated measurement resolution is 0.15 ± 0.027 nm. The stability of the HCGIL is −0.41 ± 0.23 nm. Therefore, the HCGIL has potential for subnanometer resolution and long-range applications.
Relation:	Optics Express 21(11), pp.13322-13332
DOI:	10.1364/OE.21.013322
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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