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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/93406


    Title: Heterodyne common-path grating interferometer with Littrow configuration
    Authors: Wu, Chyan-Chyi;Hsu, Cheng-Chih;Lee, Ju-Yi;Chen, Yan-Zou
    Contributors: 淡江大學機械與機電工程學系
    Date: 2013-06
    Issue Date: 2014-01-08 23:32:49 (UTC+8)
    Publisher: Washington: Optical Society of America
    Abstract: This paper presents a heterodyne common-path grating interferometer with Littrow configuration (HCGIL). The HCGIL can effectively overcome environmental disturbance effect and the DC offset and the amplitude variation of the measurement signals. Experimental results match well with the HP5529A results for long-range measurements. Results also show that the estimated measurement resolution is 0.15 ± 0.027 nm. The stability of the HCGIL is −0.41 ± 0.23 nm. Therefore, the HCGIL has potential for subnanometer resolution and long-range applications.
    Relation: Optics Express 21(11), pp.13322-13332
    DOI: 10.1364/OE.21.013322
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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