Littrow-type self-aligned laser encoder with high tolerance using double diffractions

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/93405

Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/93405

Title:	Littrow-type self-aligned laser encoder with high tolerance using double diffractions
Authors:	Wu, Chyan-Chyi;Hsu, Cheng-Chih;Lee, Ju-Yi;Chen, Yan-Zou;Yang, Jhih-Sheng
Contributors:	淡江大學機械與機電工程學系
Keywords:	Displacement;Grating;Long range;Littrow
Date:	2013-06
Issue Date:	2014-01-08 23:30:53 (UTC+8)
Publisher:	North-Holland: Elsevier BV
Abstract:	This study proposes a Littrow-type self-aligned laser encoder system (LisaLENS) with double diffractions. The LisaLENS has simple optical paths, facilitating alignment and manufacture, and fewer optical components than current laser encoders. This study analyzes the theoretical measurement resolution of this system and verifies the feasibilities of its long- and short-range measurements through experiments. Experimental results show that the LisaLENS has a resolution of 5.5±1.4 nm. Thus, this design has wide applications in various fields, especially for monitoring the displacement and vibration of precision-motorized stages.
Relation:	Optics Communications 297, pp.89-97
DOI:	10.1016/j.optcom.2013.01.048
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

Files in This Item:

File	Description	Size	Format
index.html		0Kb	HTML	332	View/Open
Littrow-type self-aligned laser encoder with high tolerance using double diffractions.pdf		1178Kb	Adobe PDF	1	View/Open