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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/93405

    Title: Littrow-type self-aligned laser encoder with high tolerance using double diffractions
    Authors: Wu, Chyan-Chyi;Hsu, Cheng-Chih;Lee, Ju-Yi;Chen, Yan-Zou;Yang, Jhih-Sheng
    Contributors: 淡江大學機械與機電工程學系
    Keywords: Displacement;Grating;Long range;Littrow
    Date: 2013-06
    Issue Date: 2014-01-08 23:30:53 (UTC+8)
    Publisher: North-Holland: Elsevier BV
    Abstract: This study proposes a Littrow-type self-aligned laser encoder system (LisaLENS) with double diffractions. The LisaLENS has simple optical paths, facilitating alignment and manufacture, and fewer optical components than current laser encoders. This study analyzes the theoretical measurement resolution of this system and verifies the feasibilities of its long- and short-range measurements through experiments. Experimental results show that the LisaLENS has a resolution of 5.5±1.4 nm. Thus, this design has wide applications in various fields, especially for monitoring the displacement and vibration of precision-motorized stages.
    Relation: Optics Communications 297, pp.89-€“97
    DOI: 10.1016/j.optcom.2013.01.048
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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