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    題名: Littrow-type self-aligned laser encoder with high tolerance using double diffractions
    作者: Wu, Chyan-Chyi;Hsu, Cheng-Chih;Lee, Ju-Yi;Chen, Yan-Zou;Yang, Jhih-Sheng
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: Displacement;Grating;Long range;Littrow
    日期: 2013-06
    上傳時間: 2014-01-08 23:30:53 (UTC+8)
    出版者: North-Holland: Elsevier BV
    摘要: This study proposes a Littrow-type self-aligned laser encoder system (LisaLENS) with double diffractions. The LisaLENS has simple optical paths, facilitating alignment and manufacture, and fewer optical components than current laser encoders. This study analyzes the theoretical measurement resolution of this system and verifies the feasibilities of its long- and short-range measurements through experiments. Experimental results show that the LisaLENS has a resolution of 5.5±1.4 nm. Thus, this design has wide applications in various fields, especially for monitoring the displacement and vibration of precision-motorized stages.
    關聯: Optics Communications 297, pp.89-€“97
    DOI: 10.1016/j.optcom.2013.01.048
    顯示於類別:[機械與機電工程學系暨研究所] 期刊論文

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