Common-path laser encoder with Littrow configuration

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/93402

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Title:	Common-path laser encoder with Littrow configuration
Authors:	Wu, Chyan-Chyi;Liao, Chia-Huang;Chen, Yan-Zou;Yang, Jhih-Sheng
Contributors:	淡江大學機械與機電工程學系
Keywords:	Common-path;Grating;Littrow;Tolerance;Runout
Date:	2013-04
Issue Date:	2014-01-08 23:20:11 (UTC+8)
Publisher:	Lausanne: Elsevier S.A.
Abstract:	This paper proposes a novel common-path laser encoder with a Littrow configuration (CPLi). The CPLi combines the merits of the 1 − x telescope and Littrow mount so that the CPLi can have high tolerance to head-to-scale runout. The CPLi can effectively slash the environmental disturbance effect to its lowest level. The runout tolerance is found to be 1.5–3 times greater than that of our previous work. The experimental results of the CPLi match well with those of the HP5529A for long-range measurements. The CPLi attains a measurement resolution of 0.12 ± 0.021 nm. Its system stability is as low as −0.25 ± 0.098 nm/h. It has a promising potential for nanometer resolution and long-range applications.
Relation:	Sensors and Actuators A: Physical 193, pp.69–78
DOI:	10.1016/j.sna.2012.12.035
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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