Common-path laser planar encoder

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/93401

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题名:	Common-path laser planar encoder
作者:	Wu, Chyan-Chyi;Chen, Yan-Zou;Liao, Chia-Huang
贡献者:	淡江大學機械與機電工程學系
日期:	2013-08
上传时间:	2014-01-08 23:18:02 (UTC+8)
出版者:	Washington: Optical Society of America
摘要:	This paper presents a common-path laser planar encoder (CLPE) for displacement measurements in the X- and Y- axes. The CLPE can effectively reduce the environmental disturbance to its lowest level. The experimental results of the CLPE match well with those of HP5529A for both short and long ranges. The CLPE can measure 2D displacement with high resolutions of 0.07 ± 0.021 nm and 0.07 ± 0.023 nm in the X- and Y- axes and also presents high system stabilities of −0.59 ± 0.43 nm/h and −0.63 ± 0.47 nm/h respectively in the X- and Y- axes. The CLPE has promising potential for nanometer resolution and large-range applications.
關聯:	Optics Express 21(16), pp.18872–18883
DOI:	10.1364/OE.21.018872
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文

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