Common-path laser planar encoder

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/93401

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Title:	Common-path laser planar encoder
Authors:	Wu, Chyan-Chyi;Chen, Yan-Zou;Liao, Chia-Huang
Contributors:	淡江大學機械與機電工程學系
Date:	2013-08
Issue Date:	2014-01-08 23:18:02 (UTC+8)
Publisher:	Washington: Optical Society of America
Abstract:	This paper presents a common-path laser planar encoder (CLPE) for displacement measurements in the X- and Y- axes. The CLPE can effectively reduce the environmental disturbance to its lowest level. The experimental results of the CLPE match well with those of HP5529A for both short and long ranges. The CLPE can measure 2D displacement with high resolutions of 0.07 ± 0.021 nm and 0.07 ± 0.023 nm in the X- and Y- axes and also presents high system stabilities of −0.59 ± 0.43 nm/h and −0.63 ± 0.47 nm/h respectively in the X- and Y- axes. The CLPE has promising potential for nanometer resolution and large-range applications.
Relation:	Optics Express 21(16), pp.18872–18883
DOI:	10.1364/OE.21.018872
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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