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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/93401


    Title: Common-path laser planar encoder
    Authors: Wu, Chyan-Chyi;Chen, Yan-Zou;Liao, Chia-Huang
    Contributors: 淡江大學機械與機電工程學系
    Date: 2013-08
    Issue Date: 2014-01-08 23:18:02 (UTC+8)
    Publisher: Washington: Optical Society of America
    Abstract: This paper presents a common-path laser planar encoder (CLPE) for displacement measurements in the X- and Y- axes. The CLPE can effectively reduce the environmental disturbance to its lowest level. The experimental results of the CLPE match well with those of HP5529A for both short and long ranges. The CLPE can measure 2D displacement with high resolutions of 0.07 ± 0.021 nm and 0.07 ± 0.023 nm in the X- and Y- axes and also presents high system stabilities of −0.59 ± 0.43 nm/h and −0.63 ± 0.47 nm/h respectively in the X- and Y- axes. The CLPE has promising potential for nanometer resolution and large-range applications.
    Relation: Optics Express 21(16), pp.18872–18883
    DOI: 10.1364/OE.21.018872
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

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