Design and fabrication of a diaphragm type thermo-buckled microactuators

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 會議論文 > Item 987654321/92166

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題名:	Design and fabrication of a diaphragm type thermo-buckled microactuators
作者:	Wang, Jiun-Min;Lin, Hung-Hua;Lin, Yue-Jheng;Ou, Yu-Cheng;Yang, Lung-Jieh;Lin, Chii-Wann;Yang, Yao-Joe;Lin, Wei-Chih
貢獻者:	淡江大學機械與機電工程學系
關鍵詞:	microactuator;parylene;thermo-buckled
日期:	2006-01
上傳時間:	2013-09-12 16:13:36 (UTC+8)
摘要:	This study presents a novel diaphragm type thermo- buckled microactuator with only a driving voltage of 3 V and under a working temperature far below 100degC. It's a sandwich structure composed of a platinum (Pt) resistor between two parylene films with different thickness. The platinum resistor is assigned as a heating source. Therefore, the parylene diaphragm with different thicknesses of top and bottom layers is heated by the embedded Pt resistor. The non-uniform temperature rise of the parylene diaphragm not only generates an out-of-plane thermo-buckling deformation, but also induces an asymmetric deflection inclined to upward or downward direction. The maximum displacement of the diaphragm is 0.4 mum and the cutoff frequency is 1000 Hz by a driving voltage of 3 V.
關聯:	o/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on, pp.873-876
DOI:	10.1109/NEMS.2006.334555
顯示於類別:	[機械與機電工程學系暨研究所] 會議論文

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