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    题名: Design and fabrication of a diaphragm type thermo-buckled microactuators
    作者: Wang, Jiun-Min;Lin, Hung-Hua;Lin, Yue-Jheng;Ou, Yu-Cheng;Yang, Lung-Jieh;Lin, Chii-Wann;Yang, Yao-Joe;Lin, Wei-Chih
    贡献者: 淡江大學機械與機電工程學系
    关键词: microactuator;parylene;thermo-buckled
    日期: 2006-01
    上传时间: 2013-09-12 16:13:36 (UTC+8)
    摘要: This study presents a novel diaphragm type thermo- buckled microactuator with only a driving voltage of 3 V and under a working temperature far below 100degC. It's a sandwich structure composed of a platinum (Pt) resistor between two parylene films with different thickness. The platinum resistor is assigned as a heating source. Therefore, the parylene diaphragm with different thicknesses of top and bottom layers is heated by the embedded Pt resistor. The non-uniform temperature rise of the parylene diaphragm not only generates an out-of-plane thermo-buckling deformation, but also induces an asymmetric deflection inclined to upward or downward direction. The maximum displacement of the diaphragm is 0.4 mum and the cutoff frequency is 1000 Hz by a driving voltage of 3 V.
    關聯: o/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on, pp.873-876
    DOI: 10.1109/NEMS.2006.334555
    显示于类别:[機械與機電工程學系暨研究所] 會議論文


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