Quasi-common-path heterodyne grating interferometernal Performance--Empirical Evidence in Taiwan

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 會議論文 > Item 987654321/92003

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题名:	Quasi-common-path heterodyne grating interferometernal Performance--Empirical Evidence in Taiwan
作者:	J.Y. Lee, W.T. Wu, C.C. Hsu, C.C. Wu, and G. Lerondel
贡献者:	淡江大學管理科學學系
关键词:	heterodyne interferometry;grating;quasi-common-path
日期:	2008-09-08
上传时间:	2013-08-12 15:08:48 (UTC+8)
摘要:	A quasicommon-path heterodyne grating interferometer for displacement measurement is proposed. This measurement system includes a heterodyne light source, a moving grating, a few optical elements and a lock-in amplifier for phase measurement. The phase shift of the diffracted beams from grating is measured by the heterodyne technique. The grating displacement is determined by the relationship of the optical phase variation and grating pitch. The experimental results demonstrated the measurement resolution of 1 nm and the high system stability. Benefiting from the heterodyne interferometric phase measurement, this method has advantages of high measurement resolution, relatively straightforward operation.
關聯:	Proceedings of ICPM 2008
DOI:	10.1109/IEEM.2010.5674243
显示于类别:	[機械與機電工程學系暨研究所] 會議論文 [管理科學學系暨研究所] 會議論文

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