Quasi-common-path heterodyne grating interferometernal Performance--Empirical Evidence in Taiwan

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Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/92003

Title:	Quasi-common-path heterodyne grating interferometernal Performance--Empirical Evidence in Taiwan
Authors:	J.Y. Lee, W.T. Wu, C.C. Hsu, C.C. Wu, and G. Lerondel
Contributors:	淡江大學管理科學學系
Keywords:	heterodyne interferometry;grating;quasi-common-path
Date:	2008-09-08
Issue Date:	2013-08-12 15:08:48 (UTC+8)
Abstract:	A quasicommon-path heterodyne grating interferometer for displacement measurement is proposed. This measurement system includes a heterodyne light source, a moving grating, a few optical elements and a lock-in amplifier for phase measurement. The phase shift of the diffracted beams from grating is measured by the heterodyne technique. The grating displacement is determined by the relationship of the optical phase variation and grating pitch. The experimental results demonstrated the measurement resolution of 1 nm and the high system stability. Benefiting from the heterodyne interferometric phase measurement, this method has advantages of high measurement resolution, relatively straightforward operation.
Relation:	Proceedings of ICPM 2008
DOI:	10.1109/IEEM.2010.5674243
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Proceeding [Department of Management Sciences] Proceeding

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