液滴蒸發於噴鍍製程之機制研究

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Title:	液滴蒸發於噴鍍製程之機制研究
Other Titles:	A research on the mechanism of droplet evaporation in sputtering under atmospheric pressure
Authors:	陳俊樺;Chen, Jyun-Hua
Contributors:	淡江大學航空太空工程學系碩士班湯敬民
Keywords:	因次分析;Dimensional Analysis;液滴;蒸發;FLUENT;DPM;droplet evaporation
Date:	2013
Issue Date:	2013-04-13 11:59:02 (UTC+8)
Abstract:	本文主要在探討液滴於高溫流場中蒸發與運動之研究。研究主要分為兩個部份，第一個部份探討流場因次分析及液滴之運動過程。第二部份為液滴運動之數值計算，此計算中包括粒子運動過程中因受熱而蒸發所產生之熱傳、質傳特性研究。經因次分析推導證明，液滴在受熱後，蒸發現象會受到環境溫度、氣流速度、濃度、液滴直徑長度及液滴速度影響。模擬主要利用Fluent軟體中離散相模組(DPM，Discrete Phase Model)求解液滴噴入不同溫度底板過程之速度變化與溫度分佈。從模擬結果得知，上升氣流與噴嘴噴入之氣流會因交互作用，而影響噴入液滴的速度及溫度。透過解析方法及數值結果可驗證，隨著液滴直徑越大，液滴之蒸發率會與液滴直徑呈正比。但液滴直徑增加，會使直徑縮減率降低。 This paper discussed the evaporation of droplets on a high-temperature plate. The study was divided into two parts. First part concerned the dimensional analysis of the parameters of the flow and droplet. Second part included the numerical simulation of the characteristics of the heat and mass transfer induced by evaporation through heating of the moving droplets. Using dimensional analysis, the evaporation of the droplets were function of the temperature of the environment , the air flow rate from the nozzle, the concentration, the droplet size and the droplet velocity. The DPM (Discrete Phase Model) module included in Fluent was used for the computation of the velocity and temperature distributions above a heated plate. From the result of simulation, the upflowing heated air stream was impacted by the nozzle flow. This affected the movement and temperature of the droplet. According to both analytical and numerical results, the larger the diameter , the higher evaporation rate would be. However, the larger the diameter, the smaller diameter reduction rate was observed.
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