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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/88040

    Title: 基於布拉格光纖光柵之介尺度三維量測研究
    Other Titles: The study of fiber bragg grating based meso-scale three-dimensional measurement
    Authors: 邱威泰;Chiu, Wei-Tai
    Contributors: 淡江大學機械與機電工程學系碩士班
    Keywords: 布拉格光纖光柵;介尺度;干涉;相位;fber Bragg grating;Meso-scale;Interference;Phase
    Date: 2012
    Issue Date: 2013-04-13 11:58:01 (UTC+8)
    Abstract: 全球當前量測技術於介尺度三維量測上遭遇到瓶頸。過去十年,全球各主要國家的研究組織進行多項與探頭感測器相關的研究工作,但並沒有太大的突破,例如燃油噴嘴孔徑的三維形貌量測,沒有適當儀器可得知元件之加工精密度,主要原因在於提出的方法及設計,無法應用在高深寬比的結構上。
    The worldwide metrology in meso-scale three-dimensional topography encounters a bottleneck. Over past a decade, the major countries over the world, cooperated with world-renowned research organizations to carry out a number of research work related to the probing sensors, but there is no great breakthrough. As an example for three-dimensional topology of the fuel nozzle aperture measurements, there is no appropriate instruments which can be learn of the manufacturing accuracies of components. The main reason relies on the fact that known methods and designs fail in measuring microstructures with high aspect ratio.
    In this study, an optical sensing technique of fiber probing head is proposed. It has high sensitivity and can be applied in the characterization of the meso-scale structures. The operation principle is based on fiber Bragg grating principle, and optical interferometry (HP5529A) provide displacement measurement standards, and provide incremental displacement piezoelectric column, which is expected to significantly enhance the resolution of the probe sensing displacement to reduce the measurement uncertainty.
    The pre-travel is the major error source for micro coordinate measuring systems. Our probing sensing technique is touch-triggered. Experimental results demonstrate that our probing sensor has an in-plane pre-travel of 10 nm. The specification outperforms the one of Ji’s method. Accordingly, our probing sensor can effectively improve the measurement accuracy. It has many merits: easy build-up, low cost and high-resolution.
    Appears in Collections:[機械與機電工程學系暨研究所] 學位論文

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