English  |  正體中文  |  简体中文  |  Items with full text/Total items : 52359/87459 (60%)
Visitors : 9141095      Online Users : 179
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/88038

    Title: 四維量測偏光散射儀結構分析與最佳設計
    Other Titles: Structural analysis and design optimization for four-axis polarized scattering instrument
    Authors: 黃永安;Huang, Yong-An
    Contributors: 淡江大學機械與機電工程學系碩士班
    史建中;Shih, Chien-Jong
    Keywords: 偏光散射量測儀;拓樸最佳化;最佳化設計;電腦輔助機械設計;Polarized scattering instruments;Topology optimization;Optimization design;Computer-aided mechanical design
    Date: 2012
    Issue Date: 2013-04-13 11:57:56 (UTC+8)
    Abstract: 本文介紹一款新型四維偏光散射量測儀,可量測晶圓表面粗糙度與螺紋的表面規格。為了達到精確及快速測量,該機被設計成有四個旋轉的機構,可用在二維及三維量測。光學機構必須具備結構穩定性,以保持光學元件間的相對位置,以維持系統的整體性能品質。本文以有限元素進行整體結構分析,檢測結構的性能。應用拓樸結構最佳化方法,解得重量輕及滿足剛度需求的轉動平板結構改良型態。為考慮最佳拓樸型態之可加工性,分別使用拓樸最佳化及參數最佳化的循環計算,再進行尺寸最佳化,增進結構性能。
    A new four-axis polarized scattering instrument is presented and the critical structure of influencing the whole system is improved by optimium design methodology. This new type instrument can be conveniently and rapidly operated to achieve satisfying results including the function of three and two axis measuring requirement.
    For further enhance the performance of the current instrument , a systematic structural analysis is applied to determine the critical member. So that it can be modified to be a better performance . The common rotating plate where the detector is sliding on that plate is found to be the most critical member. The design task is to remove the existing supporting roller that is replaced by a cantilever moving arm, however the primary sizes and required performance must be maintained.
    This work apply topological structural optimization to obtain the initial layout of such a common moving arm. Three models are presented to improve the original slide way, long cantilever arm and static displacement. The first kind is directly modified from original slideway. The second kind is a simplified modification to the first kind structure. The third kind is a triangle slide way structure. All of them went through topological optimization , man-made shape design and parameter optimization. The result of first kind design can achieve static the displacement of 0.0814mm that is less than required 0.12mm . The third kind design can reach to 0.0722mm .
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Thesis

    Files in This Item:

    File SizeFormat

    All items in 機構典藏 are protected by copyright, with all rights reserved.

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback