由於微陣列之零件需求量越來越大，需要微奈米大小的微陣列模具來迅速製造及複製這些微結構，多年來已經使用各種方法來製造這些模具，如光蝕刻技術、FIB(聚焦離子束)和精密鑽石車削，而這些方法中又以鑽石車削為工業界最常見的製作方法，利用鑽石刀具將微結構陣列製作於大型滾筒上，再以roll-to-roll的方式生產BEF(稜鏡片)或是3D薄模。然而，在加工模具的微切削過程中往往會產生毛邊，毛邊不僅會影響模具的精度也同時增加了加工的費用。這些毛邊一般是在微奈米等級，而實驗觀察之微切削過程的毛邊是相當困難且昂貴的。本研究的目的是在利用模擬分析微刮痕過程形成的毛邊，使用不同的切削參數，如前角、傾斜角、刀具尖端半徑、刀具角度、切削速度以及切深，進行了一個系統的研究。結果表示由刮痕試驗可用來印證模擬分析之結果，表示模擬分析可以有效的預測毛邊之形式。 As the demand for micro-patterned parts getting bigger, the need for molds with micro/nano scaled patterns to duplicate these parts effectively and economically is increasing ever so rapidly. Over the years, numerous attempts have been made to fabricate these molds using various approaches such as lithography, FIB, and precision diamond turning. Amongst these approaches, diamond turning is by far the most commonly used method to generate the micro-patterned rollers for roll-to-roll fabricating of precision optical parts such as BEF and 3D films. However, micro-burrs are frequently producedduring the micro-cutting process which not only makes the mold un-usable but also increases the cost of machining. Since the micro-patterns/burrs are normally in micrometer-scale and the mold is usually too big to put into SEM for close examination, experimentally observation of the micro-cutting process and burr formation is rather difficult and costly.This research aimed to study the chip/burr formationprocess during the micro-cutting by simulation and micro-scratching approaches. Influences of the cutting parameters such as rake angle, inclination angle, tip radius, included angle, cutting speed and cut depthon the chip/burr formation were systematically investigated. The results showed good agreement with the scratching experiments. This means that simulation can supply very useful information for setting the machining parameters to suppress the burr formation during micro-cutting process.