本文利用直接模擬蒙地卡羅 (Direct simulation Monte Carlo,DSMC)法模擬了三種積體電路中常見的幾何微管,分別為矩形空管，微結構管與背向式階梯管，而我們利用以上三種幾合微管，探討其流場中的非平衡區域的性質，比較各種微管的平衡區及非平衡區不同之處，並透過了其模擬結果，了解非平衡區域中，流場速度與溫度是否與非平衡區域的分佈有關，並將上述三種幾合微管，分別隨機取其平衡與非平衡區域中的1~2點,來比較其相對應機率密度函數之分佈所呈現的變化與關係。 The direct simulation Monte Carlo (the Direct simulation Monte Carlo DSMC) method to simulatethe three integrated circuits geometry of microtubules, respectively, microchannel flows, micro -structures microchannel and backward-facing step flows, while we usethree kinds together a few microtubules to explore the nature of the flow fields of non-equilibrium region, various microtubule balance area and the different non-equilibrium zone, through the simulation results, the region of non-equilibrium, whether the flow velocity and temperatureand distribution of non-equilibrium region, and these three several co-microtubules were randomly whichever is 1-2 in the area of balanced and unbalanced, to compare the relative change and relationships should be presented by the distribution of the probability density function.
