本文利用有限元素分析軟體ANSYS來分析一新式微型壓力感測器之壓力薄膜受力情形。依據其薄膜表面佈植之壓電阻受力形變及應力數值，直接推導出壓力感測器之理論輸出電壓靈敏度及非線性度。其結果可作為感測器製作前之性能評估。 In this paper, we use the FEM software to analyze the surface'sdeformation of the silicon membrane in the new micro pressure sensor.According the deformation and stress of piezoresistor's on themembrane, we can derive the ideal sensitivity and non-line arty ofpressure sensor. The result can be estimated to process of sensor.
關聯:
八十九年度中華民國力學學會年會暨第二十四屆全國力學會議論文集=24th National Conference on Applied and Theoretical Mechanics, 頁N.A.(CD)
