本文利用兩種不同的技術'高分子新型微加工技術製和半導體製程技術分別製作三維
式微文氏管與二維式微文氏管，首先利用聚甲基丙;時酸晶( PMMA, Polymethylmethacrylate)
與甲醇( methyl )產生物理化學變化，質傳效應使眾甲基丙;時酸路發生膨潤現象，利用此
現象來進行高分子加工成形。目前利用此技術可將喉部收縮至100μm' 在成形均勻度與表
面粗度等上有改進空間。其次利用乾蝕刻(dry etching)與靜電接合(anodic bonding)技術於矽
晶片上製作微文氏管(micro venturi tube) 、微孔口板(micro orifice)及微噴嘴(micro nozzle) ,
並以氮氧為工作流體，流道寬度由100-200μm 、喉部尺寸為25-50μm 及流道深寬比
0.025-0.11 下進行測試。當流體流經微流道會發生滑動與壓縮現象，在探討流道內各種不
同微結構對流力特性的影響，目前只做初步的討論，幾組壓力降與流量數據是由微文氏管
(進口角度為20 。及衍。)、微孔口與微直流道等量測而得。 This paper is proposed to utilize two different processing technologies, polymer micro
machining and silicon bulk micro machining to fabricate 3D micro venturi tube and 2D micro
venturi tube respectively. In the first, combining polymethylmethacrylate (PMMA) and methyl to
generate physicakhemical change, PMMA appears swelling phenomenon by mass transfer
effects. This polymer swelling process can form 3D micro venturi tube. Now it is successful to
reduce the throat size of tube up to 100/-!m by using the technologies, but the machining
unifom1ity and the surface roughness still is worth to improve. Secondly, 2D micro venturi tube,
micro orifice and micro nozzle are fabricated in silicon wafer with #7740glass by dry etching
and anodic bonding technology. Using nitrogen gas as working fluid, experiments were
conducted by these 2D microstructures with channel width of 100-200/-!m, throat size of 15~50J.l.m and · aspect ratio o-f 0.025-0.11. Fluid flowed through micro channel to show sliding
and compressible phenomenon. Preliminary research has been done to investigate the fluid flow
characteristics in each different micro channel structure, A series of pressure drop and flow rate
data were measured and evaluated for inlet 20-degree, 45-degree micro vent uri tube, micro
orifice, and straight micro channel.
Relation:
中華民國力學學會90年度年會暨第25屆全國力學會議=Proceedings of 25 National Conference of Theoretical and Applied Mechanics，12頁
