本文以數值方法求解Navier-Stokes方程組來模擬側向振動梳狀微結構流場，數 值計算所得之品質因子與實驗結果相當吻合。數值結果顯示作簡諧運動的結構底 面的阻尼約為 全部阻尼的66%，此一數值與Couette flow模型所計算結果相當吻 合，上表面、側表面及前表面之阻尼各約為全部的10-12%。滑動效應會減少約 7%的下表面阻尼。 The Navier-Stokes simulation was used to simulate two laterally driven micro comb structures in this study. The total quality factors predicted numerically agree quite well with the experimental data. The numerical results show that the bottom surface of the oscillating structure contributes about 66% of the total damping and is very close to that predicted by the Couette flow model. The top, side, and edge surface each contributes about 10-12%. The slip effect was also included in this study. The slip effect reduces the viscous damping on the bottom surface of the oscillating structure by about 7%.