本文主要以Stokes type flow探討在側向振動梳狀微結構裡的流場模型，並分別比較了不可滑動及滑動邊界條件對此系統所造成的影響，並且探討梳狀微結構的尺寸、頻率在此系統中之重要性，以得到空氣黏滯效應，並進一步求得品質因子與阻尼之值，由解析解分別計算不可滑動及滑動邊界條件而得之Q值與實驗值相比較，可得計算之值均稍大於實驗值，造成此結果可能是因我們假設此結構為無限長之平板，而實際上平板為有限長，低估了有限長平板邊界對於流場的影響所導致。 This paper studies the effect of viscous air damping on the dynamicbehavior of micro comb structures. The influence of dimension and frequency on the system is investigated. Because the gaps between thestructures are very small, the slip effect is also studied. Theanalytical results show that theoretical quality factors are largerthan experimental values for both the slip and the non-slip boundaryconditions. The possible explanation for this discrepancy is that ourmodel assumes the structure is two-dimensional while the actualstructure is three-dimensional, the boundary might have a significanteffect on the flow field.
