Nanocrystalline diamond (NCD) films are prospective materials for micro/nanoelectromechanical systems (M/NEMS), due to their unique mechanical and tribological properties. In the present study, we report N+ ion implantation on NCD films, which exhibit superhydrophobic properties and ultra low friction coefficient contrary to as-deposited films. Interestingly, in microtribo-test, super low friction coefficient is observed due to the formation of carbonaceous transferlayer on the ball counter body. However, in nanotribo-test, high friction coefficient is obtained which is caused by severe deformation of ball due to the absence of stable transfer layer.
