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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/77464

    Title: 液體霧化對流場表現之影響
    Other Titles: Atomized liquid affect the performance of the flow field
    Authors: 王孝瑄;Wang, Hsiao-hsuan
    Contributors: 淡江大學機械與機電工程學系碩士班
    李宗翰;Lee, Tzung-hang
    Keywords: 蝕刻;平面蝕刻加工;汰換率;表面加工;平板蝕刻;噴流;流場;壓力;流量;水坑效應;Etching;Surface etching process;Replacement of rate;Surface treatment;Etching plate;Jet;Flow field;Pressure;flow;Puddle effect
    Date: 2012
    Issue Date: 2012-06-21 06:47:33 (UTC+8)
    Abstract: 近年來大面積平面蝕刻加工越來越廣泛,隨著平面蝕刻加工面積的變大,產生許多蝕刻速率不均等的現象,本文著重在討論使用均流霧化噴頭進行汰換率增加的噴流,所造成之流場之變化,與其變化之克服。
    In recent years, large areas of flat etching process more and more widely, with the surface area of the larger etching process, resulting in many uneven etching rate of the phenomenon, this article focuses on using both the atomization nozzle flow rate of increase in jet replacement of the field caused by the change of his ilk, and their change of overcoming.
    This was the first among the experimental reproducibility of the test apparatus, for exports and imports in the next side of the comparison, at a fixed height to change the pressure and flow, its relative impact of changes in the relationship, and finally when the flow field of the subject spray jet crash that occurred when the depth of the phenomenon and its measurement, the liquid to increase the replacement of rate will not make a direct impact jet surface, resulting in uneven surface hydraulic state, in order to solve large-scale surface etching occurs when the replacement of rate of flow field and flow field uneven surface uneven pressure of the problem.
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Thesis

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