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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/76636

    Title: Microfabrication Process for Making Microstructures as Geometrically Mimiaturized from Three-Dimensional Orientations
    Authors: Lin, Ching-bin;康尚文;Kang, Shung-wen;Wei, Mau-kuo
    Contributors: 淡江大學機械與機電工程學系
    Date: 2001-04
    Issue Date: 2012-05-14 20:22:55 (UTC+8)
    Abstract: A microfabrication process comprises the swelling of at least a hydrophilic polymer in order for shrinking each cavity size of a micromachined microstructure pattern from three-dimensional orientations, whereby upon filling or deposition of metal into each cavity of the pattern when performing an electroforming step, a supermini microstructure with slim, fine, thin and small size can be obtained as geometrically miniaturized from three-dimensional orientations.
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Patent

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