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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/76579

    Title: 微結構
    Authors: 康尚文;楊鍚杭;林哲平
    Contributors: 淡江大學機械與機電工程學系
    Date: 2003-07
    Issue Date: 2012-05-14 16:44:53 (UTC+8)
    Publisher: 新竹市:行政院國家科學委員會精密儀器發展中心
    Relation: 微機電系統技術與應用 = Micro electro mechanical systems technology & application,頁417-466
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Chapter

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