This research paper was performed to study and utilizes two kinds of materials which match with two different fabrications in order to design an ideal shape of microneedles. The technology employs the polymer microneedles and the silicon microneedles with the height of 236 mum and 350 mum respectively. Moreover, the transdermal drug delivery investigation was conducted by using the fabricated samples to estimate the feasibility of the microneedles. Polymer microneedles were formed by molding the V-grooves structure on silicon wafer. The SU-8 negative photoresist was introduced for the subject structural material of the microneedles. Silicon microneedles were formed by KOH etching solution, solely depending on controlling etching time and the principle of fast-etching planes.
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on, pp.639-642