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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/74861

    Title: Formation of SiGe Nanorod Arrays by Combining Nanoshpere Lithography and Au-assisted Chemical Etching
    Authors: Lai, C. H.;Lee, Y. J.;葉炳宏;Yeh, P. H.;Lee, S. W.
    Contributors: 淡江大學物理學系
    Date: 2011-06-23
    Issue Date: 2012-02-09 15:54:50 (UTC+8)
    Publisher: IEEE Electron Devices Society
    Relation: 2011 IEEE 4th International Nanoelectronics Conference(INEC), Tao-Yuan, Taiwan
    DOI: 10.1109/INEC.2011.5991752
    Appears in Collections:[Graduate Institute & Department of Physics] Proceeding

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