光機電整合 : 基於布拉格光纖光柵之介尺度三維量測研究

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Title:	光機電整合 : 基於布拉格光纖光柵之介尺度三維量測研究
Other Titles:	Optomechatronics : the study of fiber bragg grating based meso-scale three-dimensional measurement
Authors:	洪堯宇;Hong, Yao-Yu
Contributors:	淡江大學機械與機電工程學系碩士班吳乾埼;Wu, chyan-Chyi
Keywords:	布拉格光纖光柵;介尺度;干涉;相位;Fiber Bragg grating;Meso-scale;Interference;Phase
Date:	2011
Issue Date:	2011-12-28 19:10:26 (UTC+8)
Abstract:	全球當前量測技術於介尺度三維量測上遭遇到瓶頸，而該技術瓶頸乃在於探針式探頭感測器的設計與製造上。隨著科技進步，特徵尺寸範圍在μm到mm的介尺度元件需求急速增加，量測準確度需求更已達到奈米等級。過去十年，全球各主要國家的研究組織結合全球知名公司進行多項與探頭感測器相關的研究工作，但並沒有太大的突破。主要的原因在於他們所提出的方法多半有靈敏度不高、探針施力過大以及探針直徑太粗等問題。本研究提出一種高靈敏度的光纖探針式探頭光學感測技術，它沒有前述的缺點，它採用布拉格光纖光柵原理，搭配光學干涉術，可確保光纖探頭感測器在奈米等級位移時即能夠產生碰觸觸發訊號，很有機會可以突破全球當前量測技術的瓶頸。 Currently the global measurement technology in meso-scale three-dimensional topographyencountered a bottleneck, which lies in the design and manufacture of the probe type of the probing sensor. With the progress of science and technology, the need of meso-scale components with their feature size ranging from micrometers to millimeters rapidly increase. The demand for measurement accuracy has reached the nanometer level even more. Over the past decade, the world’s major countries, cooperated with world-renowned research organizations and companies to carry out a number of research work related to the probing sensors, but there is not any great breakthrough. The main reason is that most of the proposed methods have low sensitivities, large contact forces and large probe diameters. In this study, a optical sensing technique of fiber probing head with high sensitivity is proposed. It does not have the foregoing shortcomings. Besides, it adopts fiber Bragg grating principle and optical interferometry. It can ensure the fiber probing head outputs the touch-trigger signal within nanometer scale displacement. It is likely to be able to break through the current global bottlenecks in measurement technology.
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Thesis

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