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    Title: 基於對稱性破壞之液體驅動器研製
    Other Titles: Fabrication of fluidic actuators based on symmetry breaking
    Authors: 馮龍田;Feng, Lung-Tien
    Contributors: 淡江大學機械與機電工程學系碩士班
    楊龍杰
    Keywords: 對稱性破壞;轉子;有限元素分析;雷諾數;Symmetry Breaking;rotor;ANSYS;Reynolds number
    Date: 2011
    Issue Date: 2011-12-28 19:09:48 (UTC+8)
    Abstract: 本論文提出基於對稱性破壞理念於微觀尺寸下進行液體驅動器之研製。在驅動元件部分設計矽晶圓腔體與微流道,以及五種不同型態之轉子,其次加入材料自然頻率理論與ANSYS有限元素分析對轉子設計進行分析模擬,並探討在不同轉子型態條件下,對於液體驅動器驅動性能之影響,以獲得最佳之運轉結果。矽晶圓製程上,利用濕蝕刻技術對矽晶圓進行非等向性蝕刻,並加入凸角補償設計,藉此修正矽晶圓之中心軸,轉子則是使用SU-8厚膜光阻,利用其高深寬比之特性製作而成。最後將PDMS進行氧氣電漿表面改質與矽晶圓基板Bonding即可完成液體驅動器結構。經由實驗結果得知,使用3葉、4葉與5葉刀片型轉子可以使其驅動,最後量測結果顯示,當3葉、4葉與5葉的液體驅動器之進水量個別在2.44 ml/min、3.5 ml/min與4.75 ml/min時轉子開始起轉,又再進水量為2.4 ml/min、3.38 ml/min與4.72 ml/min時停止旋轉,形成了遲滯現象。最後將ANSYS模擬結果經由公式計算與文獻當中的雷諾數做比較,發現其雷諾數均小於在可動範圍400以下。
    This paper proposed based on the concept of symmetry in the microscopic size of damage under the drive of the development of the liquid. Part of the design element in the drive cavity and silicon micro flow channel, and five different types of rotor, followed by adding the natural frequency of the theoretical material and ANSYS finite element analysis conducted on the rotor design analysis simulation, and explore different types of conditions the rotor, drive for drive performance liquid effect, to obtain the best operating results. Process on silicon wafers using wet etching of silicon wafer technology for anisotropic etching, convex corner compensation and join the design to fix the silicon wafer of the central axis, the rotor is the use of SU-8 thick photoresist, use its high aspect ratio of the features made. Finally, the PDMS to oxygen plasma surface modification and Bonding silicon wafer substrate to complete the fluid drive structure. By the experimental results revealed that the use of 3 leaves, 4 leaves and 5 leaf blade rotor can be driven to the final measurement results showed that when 3 leaves, 4 leaves and 5 leaves of liquid water into the drive of the individual in 2.44 ml/min, 3.5 ml/min and 4.75 ml/min beginning when the rotor turn again into the water 2.4 ml/min, 3.38 ml/min and 4.72 ml/min stop rotation, forming a hysteresis. Finally, the ANSYS simulation results calculated by the Reynolds number with which to compare the literature and found that its Reynolds number is less than 400 in the movable range of the following.
    Appears in Collections:[機械與機電工程學系暨研究所] 學位論文

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