淡江大學機構典藏:Item 987654321/7392
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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/7392


    Title: 圓弧碎形加工路徑應用於研光機之研究
    Other Titles: Research of Arc-Fractal Tool Path on Lapping Machines
    Authors: 劉偉均;陳炤彰
    Contributors: 淡江大學機械與機電工程學系
    Keywords: 研磨機;圓弧碎形加工路徑;磨粒加工;晶圓;電腦數值控制;Lapping machine;Arc fractal tool path;Abrasive machining;Wafer;Computer numerical control (CNC)
    Date: 1999
    Issue Date: 2009-03-16 15:56:26 (UTC+8)
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Research Paper

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