快速微影製作次微/奈米金屬模仁暨UV膠壓印成型研究

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Research Paper > Item 987654321/7290

Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/7290

Title:	快速微影製作次微/奈米金屬模仁暨UV膠壓印成型研究
Other Titles:	Study on Fast Lithography for Fabricating Metallic Sub-Micro/Nano-Stamps and Forming of UV Resins Using Imprinting Method
Authors:	林清彬
Contributors:	淡江大學機械與機電工程學系
Date:	2006
Issue Date:	2009-03-16 15:52:58 (UTC+8)
Abstract:	本研究在室溫下利用沉積一層相變化材料，接著使用飛秒雷射脈衝並以光熔化引發相變化技術進行快速微影，使非結晶區產生相轉變，以製得大面積結晶區之次微/奈米不同圖案陣列；此外並探討GST薄膜之厚度、均勻性及成份分析等性質。之後利用非結晶/結晶區之不同物理及化學性質，藉由選擇性蝕刻技術，直接製得微/奈米金屬模仁，在研究中應用田口實驗計劃法來降低蝕刻實驗次數，尋找出最佳化實驗參數及探討實驗因子對微/奈米金屬模仁表面粗糙度之影響，最後以壓印技術轉印出微/奈米圖案的高分子結構。
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Research Paper

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